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The chart on the growth of industry MEMS is interesting to an academic who sits in / started in a MEMS group, where it feels like net academic investment is way down. Much of the research may have moved internal (many alumni from my group end up at Apple).

Happy to chat on that if it'll help your post, DM me https://twitter.com/natolambert.

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This is a fantastic post. I participated in the last DARPA ERI Summit and attended a seminar on small MEMS fabrication that doesn't require a large fab facility. There was a startup looking for funding to do it - but it seems they solved a lot of intricate material science problems to make it actually happen. Imagine creating MEMS chips in your garage! I'll dig up the reference...

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